Data-driven Prognostic Approaches for Semiconductor Manufacturing Process: A Review of Recent Works and Future Perspectives

Author:

JAMAL Dima EL,ANANOU Bouchra,GRATON Guillaume,OULADSINE Mustapha,PINATON Jacques

Funder

Horizon 2020

Electronic Components and Systems for European Leadership

Horizon 2020 Framework Programme

Publisher

Elsevier BV

Subject

General Medicine

Reference49 articles.

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2. A review of current machine learning techniques used in manufacturing diagnosis;Ademujimi,2017

3. Remaining useful life prediction of gas turbine engine using autoregressive model;Ahsan,2017

4. Kullback-leibler divergence constructed health indicator for data-driven predictive maintenance of multi-sensor systems;Aremu,2019

5. Machine learning approaches for fault detection in semiconductor manufacturing process: A critical review of recent applications and future perspectives;Arpitha;Chemical and Biochemical Engineering Quarterly,2022

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