Limitations on control performance in the Czochralski crystal growth process using bright ring measurement as a controlled variable
Author:
Publisher
Elsevier BV
Subject
Control and Systems Engineering
Reference17 articles.
1. Developments in the weighing method of automatic crystal pulling;Bardsley;Journal of Crystal Growth,1974
2. The weighing method of automatic Czochralski crystal growth: I. basic theory;Bardsley;Journal of Crystal Growth,1977
3. The weighing method of automatic Czochralski crystal growth: II. control equipment;Bardsley;Journal of Crystal Growth,1977
4. The basis of automatic diameter control utilizing “bright ring” meniscus reflections;Digges;Journal of Crystal Growth,1975
5. Crystal growth processes based on capillarity: Czochralski, Floating zone, shaping and crucible techniques;Duffar,2010
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1. Study on Waste Heat-Driven Refrigeration System for Energy Saving and Fast Cooling of Dust Collector in Monocrystalline Silicon Manufacture;Frontiers in Energy Research;2021-09-16
2. Inverse response behaviour in the bright ring radius measurement of the Czochralski process II: Mitigation by control;Journal of Crystal Growth;2021-08
3. Inverse response behaviour in the bright ring radius measurement of the Czochralski process I: Investigation;Journal of Crystal Growth;2021-08
4. Design of parallel compensator and stabilizing controller to mitigate non-minimum phase behaviour of the Czochralski Process;IFAC-PapersOnLine;2020
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