Surface Chemical Composition and Morphology-Reference-Cited by-同舟云学术

Surface Chemical Composition and Morphology

Published:2008 Issue: Volume: Page:523-618
ISSN:
Container-title:Handbook of Silicon Wafer Cleaning Technology
language:
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Author:

Chabal Yves J.,Higashi Gregg S.,Small Robert J.

Publisher

Elsevier

Reference315 articles.

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2. Interconnection and electromigration scaling theory

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4. The Evolution of Silicon Wafer Cleaning Technology

5. Effects of Certain Chemical Treatments and Ambient Atmospheres on Surface Properties of Silicon

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