Author:
Hattori Takeo,Aiba Takeshi,Iijima Etsuo,Okube Yohichi,Nohira Hiroshi,Tate Naoto,Katayama Masatake
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference22 articles.
1. Conf. on Int. Solid-State Circuits;Horiguchi,1995
2. Conf. on Int. Solid-State Circuits;Sugibayashi,1995
3. 1994 Int. Symp. on Semiconductor Manufacturing;Seidel,1994
4. The formation of hydrogen passivated silicon single‐crystal surfaces using ultraviolet cleaning and HF etching
Cited by
50 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献