Excimer laser micro machining of inorganic dielectrics
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference28 articles.
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3. Direct production of gratings on plastic substrates using 248-nm KrF laser radiation
4. Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon
5. Glass surface treatment with excimer and CO2 lasers
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