Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference17 articles.
1. Superhard and Elastic Carbon Nitride Thin Films Having Fullerenelike Microstructure
2. Reactive sputtering of carbon and carbide targets in nitrogen
3. Prediction of New Low Compressibility Solids
4. Paracyanogenlike Structures in High-Density Amorphous Carbon Nitride
5. Transport of Carbon in Nonisothermal Low Pressure Nitrogen Plasma
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Structural changes of a-CNx thin films induced by thermal annealing;AIP Conference Proceedings;2018
2. Influence of nitrogen variation on the microstructrual, mechanical and tribological properties of CNx coatings deposited by dc unbalanced magnetron sputtering;Surface and Coatings Technology;2017-12
3. Low friction of graphene nanocrystallite embedded carbon nitride coatings prepared with MCECR plasma sputtering;Surface and Coatings Technology;2017-12
4. Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique;Surface and Coatings Technology;2013-09
5. Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition;Journal of Materials Research;2012-10-31
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3