Laser cleaning of silicon surface with deposition of different liquid films-Reference-Cited by-同舟云学术

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Laser cleaning of silicon surface with deposition of different liquid films

Published:1999-01 Issue: Volume:138-139 Page:140-144
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lu Y.F,Zhang Y,Wan Y.H,Song W.D

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference16 articles.

1. Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface

2. A practical excimer laser-based cleaning tool for removal of surface contaminants

3. CO2laser assisted particle removal threshold measurements

4. Liquid film enhanced laser cleaning

5. “Laser cleaning” removes particles from surfaces

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1. Removal mechanism of liquid-assisted nanosecond pulsed laser cleaning TA15 titanium alloy oxide film;Journal of Materials Research and Technology;2022-07

2. Blind-zone formation in laser shockwave nano-cleaning;Optics Express;2021-08-11

3. Elimination of blind zone in nanoparticle removal on silicon wafers using a double-beam laser shockwave cleaning process;Applied Surface Science;2021-02

4. Effect of laser power on cleaning mechanism and surface properties;Applied Optics;2020-10-19

5. Laser Removal of Particles from Surfaces;Laser Technology;2018-02-09

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