On the dynamics of laser-induced etching of tungsten–SiO2-composites-Reference-Cited by-同舟云学术

On the dynamics of laser-induced etching of tungsten–SiO2-composites

Published:1999-01 Issue: Volume:138-139 Page:280-284
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Schieche H.,Piglmayer K.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference9 articles.

1. K. Piglmayer, H. Schieche, R. Chabicovsky, in: Proceedings of the seminar Grundlagen und Technologie elektronischer Bauelemente of the Gesellschaft für Mikroelektronik, Wien, Groβarl, 1997.

2. K. Piglmayer, H. Schieche, R. Chabicovsky, in: Proc. of the 2nd GR-I International Conference on New Laser Technologies and Applications, Proc. SPIE 3423 (1998) 315.

3. Laser-induced etching of tungsten

4. Diffusion as the Rate Controlling Step in the Reaction of Tungsten Hexafluoride with Tungsten and the Role of Tungsten Pentafluoride

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