Recent advances in defect-selective etching of GaN
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference19 articles.
1. Etching of GaN Using Phosphoric Acid
2. Reduction of Etch Pit Density in Organometallic Vapor Phase Epitaxy-Grown GaN on Sapphire by Insertion of a Low-Temperature-Deposited Buffer Layer between High-Temperature-Grown GaN
3. Evaluation of nanopipes in MOCVD grown (0001) GaN/Al2O3 by wet chemical etching
4. Crystallographic wet chemical etching of GaN
5. Crystal Growth and Characterization of Gallium Nitride
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