Study on defects in EMCZ-Si crystal by infrared light scattering tomography
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Silicon crystal growth in a cusp magnetic field
2. Homogeneous increase in oxygen concentration in Czochralski silicon crystals by a cusp magnetic field
3. Use of an inhomogenous magnetic field for silicon crystal growth
4. Flow and temperature field in molten silicon during Czochralski crystal growth in a cusp magnetic field
5. Study on defects in CZ-Si crystals grown under three different cusp magnetic fields by infrared light scattering tomography
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4. Defect Distribution in N-Doped and Semi-Insulating 6H-SiC Bulk Single Crystal Wafers Observed by Two- and Three-Dimensional Light Scattering Tomography;Japanese Journal of Applied Physics;2008-07-11
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