Synthesis and characterization of volatile metal β-diketonate chelates of M(DPM)n (M=Ce, Gd, Y, Zr, n=3,4) used as precursors for MOCVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference18 articles.
1. The use of Ce(fod)4 as a precursor for the growth of ceria films by metal-organic chemical vapour deposition
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3. Group 2 element β-diketonate complexes: synthetic and structural investigations
4. H. Yu, G.Y. Meng, D.K. Peng, J. USTC Suppl. (1986) 66 (in Chinese).
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