High-quality plasma-assisted polishing of aluminum nitride ceramic
Author:
Funder
Japan Science and Technology Agency
Japan Society for the Promotion of Science
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference20 articles.
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4. Thermo-mechanical stability of wide-bandgap semiconductors: high temperature hardness of SiC, AlN, GaN, ZnO and ZnSe;Yonenaga;Physica B,2001
5. Thermal conductivity and dielectric constant of spark plasma sintered aluminum nitride;Khor;Materials Science and Engineering A,2003
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