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Process investigations of optical trap assisted direct-write microsphere near-field nanostructuring

  • Published:2012 Issue:1 Volume:61 Page:207-210
  • ISSN:0007-8506
  • Container-title:CIRP Annals
  • language:en
  • Short-container-title:CIRP Annals

Author:

Leitz Karl-Heinz,Quentin Ulf,Alexeev Ilya,Schmidt Michael

Funder

DFG priority programme 1327

German National Science Foundation (DFG)

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference23 articles.

1. Laser Nano-manufacturing – State of the Art and Challenges;Li;CIRP Annals – Manufacturing Technology,2011

2. Machining of Sub-micron Holes using a Femtosecond Laser at 800nm;Pronko;Optics Communication,1995

3. Sub-diffraction Limited Structuring of Solid Targets with Femtosecond Laser Pulses;Korte;Optics Express 41,2000

4. Pulsed Laser-induces Desorption and Optical Imaging on a Nanometer Scale with Scanning Near-field Microscopy using Chemically Etched Fiber Tips;Zeisel;Applied Physics Letters,1996

5. Scanning near-field optical microscopy with aperture probes: Fundamentals and applications

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