Author:
Takino H.,Kawai T.,Takeuchi Y.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference9 articles.
1. High-efficiency Condenser Design for Illuminating a Ring Field;Sweatt;OSA Proc. on Soft X-ray Projection Lithography,1993
2. Synchrotron Radiation Sources and Condensers for Projection X-ray Lithography;Murphy;Appl. Opt.,1993
3. A Novel Condenser for EUV Lithography Ring-Field Projection Optics;Chapman;Proc. SPIE,1999
4. Novel illumination system for EUVL;Komatsuda;Proc. SPIE,2000
5. Non-adhesive Direct Bonding of Tiny Parts by Means of Ultraprecision Trapezoid Microgrooves;Takeuchi;Journal of Micro system Technologies, Springer-Verlag,2001
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17 articles.
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