Ultra-precision surface grinding of PMN-PT relaxor-based ferroelectric single crystals

Author:

Namba Y.,Takahashi H.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference10 articles.

1. Piezoelectric-Supported Thrust Bearing for the Tool Slide of a Diamond Turning Machine;Bryan;Annals of the CIRP,1975

2. A Fast Response Piezoelectric Actuator for Servo Correction of Systematic Errors in Precision Machining;Kouno;Annals of the CIRP,1984

3. Thermal Deformation and its On-Line Compensation of Hydrostatically Supported Precision on Spindle;Moriwaki;Annals of the CIRP,1988

4. Ultrahigh Strain and Piezoelectric Behavior in Relaxor Based Ferroelectric Single Crystals;Park;Journal of Applied Physics,1997

5. Development of Large Diameter Piezo-Single Crystal PMN-PT of High Energy Transfer Efficiency;Matsushita;JFE Giho,2005

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