Optimization of SrRuO3 bottom electrodes fabricated by RF magnetron ion sputtering for new generation devices
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Published:2021
Issue:
Volume:47
Page:1561-1563
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ISSN:2214-7853
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Container-title:Materials Today: Proceedings
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language:en
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Short-container-title:Materials Today: Proceedings
Author:
Sharma SubhashORCID,
Vázquez Valerdi Diana E.,
Campos Mendoza Raúl,
Yocupicio-Gaxiola Rosario I.,
Abundiz Cisneros Noemí,
Siqueiros J.M.,
Raymond Herrera Oscar