1. M. Exchange, What is MEMS technology, Retrieved Jan 2014 2014
2. Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices;Berman;Prog. Surf. Sci.,2013
3. Silicon Nitride in Silicon Photonics;Blumenthal;Proc. IEEE,2018
4. L. L. Beranek, T. Mellow, Acoustics: Sound Fields and Transducers. 2012.
5. MOSFET;Di Paolo Emilio;Microelectronics,2016