Effect of pyrolysis process parameters on electrical, physical, chemical and electro-chemical properties of SU-8-derived carbon structures fabricated using the C-MEMS process-Reference-Cited by-同舟云学术

Effect of pyrolysis process parameters on electrical, physical, chemical and electro-chemical properties of SU-8-derived carbon structures fabricated using the C-MEMS process

Published:2018 Issue:3 Volume:5 Page:9669-9682
ISSN:2214-7853
Container-title:Materials Today: Proceedings
language:en
Short-container-title:Materials Today: Proceedings

Author:

Pramanick Bidhan,Vazquez-Pinon Matias,Torres-Castro Alejandro,Martinez-Chapaa Sergio O.,Madou Marc

Publisher

Elsevier BV

Subject

General Medicine

Reference27 articles.

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3. Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications

4. Carbon: The Next Silicon? Book 1 - Fundamentals;Madou,2016

5. S. Sharma, Microstructural Tuning of Glassy Carbon for Electrical and Electrochemical Sensor Applications, PhD Thesis, University of California Irvine, (2013).

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