Features of the synthesis of lithium-based ternary oxide nanofilms by atomic layer deposition with LHMDS for thin-film LIBs-Reference-Cited by-同舟云学术

Features of the synthesis of lithium-based ternary oxide nanofilms by atomic layer deposition with LHMDS for thin-film LIBs

Published:2020 Issue: Volume:25 Page:6-12
ISSN:2214-7853
Container-title:Materials Today: Proceedings
language:en
Short-container-title:Materials Today: Proceedings

Author:

Maximov Maxim Yu.,Koshtyal Yury,Mitrofanov Ilya,Ezhov Ilya,Rumyantsev Aleksander,Popovich Anatoly

Publisher

Elsevier BV

Subject

General Medicine

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