A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing
Author:
Funder
University of Johannesburg
Publisher
Elsevier BV
Subject
General Medicine
Reference56 articles.
1. AlN piezoelectric thin films for energy harvesting and acoustic devices;Fei;Nano Energy,2018
2. The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition;Chen;Mater. Sci. Semicond. Process.,2019
3. Piezoelectric aluminum nitride thin films for microelectromechanical systems;Piazza;MRS Bull.,2012
4. Effects of Cr doping on the mechanical properties of AlN films grown by the co-sputtering technique;Panda;Ceram. Int.,2019
5. Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates;Pandey;Thin Solid Films,2018
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