Funder
Defence Research and Development Organisation
Subject
Materials Science (miscellaneous)
Reference16 articles.
1. An amorphous silicon photodiode array for glass-based optical MEMS application;Moridi;Sensors,2009
2. Design and fabrication of low-cost microfluidic channel for biomedical application;Tiwari;Sci. Rep.,2020
3. Strategies in deep wet etching of Pyrex glass;Iliescu;Sens. Actuators A: Phys.,2007
4. G. Ding, B. Ma, Y. Yan, W. Yuan, J. Deng, J. Luo, Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr/Au Mask, in: 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), IEEE2021, pp. 872-5. Doi https://doi.org/10.1109/NEMS51815.2021.9451296.
5. Ultrathin glass-based wafer-level integration for miniaturized hermetic MEMS application;Huang;IEEE Trans. Components Packaging Manuf. Technol.,2023
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献