Fabrication characterization of hafnium oxide thin films
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference20 articles.
1. Microstructure, wettability, optical and electrical properties of HfO2 thin films: effect of oxygen partial pressure;Gao;Journal of Alloys and Compounds,2016
2. CO-sensing properties of hafnium oxide thin films prepared by electron beam evaporation;Durrani;Sensors and Actuators B: Chemical,2007
3. Optical and laser damage properties of HfO2/Al2O3 thin films deposited by atomic layer deposition;Zhang;Journal of Alloys and Compounds,2016
4. Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si;Lee;Ceramics International,2004
5. Microstructure and interfaces of HfO2 thin films grown on silicon substrates;He;Journal of crystal growth,2004
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of number of sol-layer on structural, optical, morphological, and compositional properties of HfO2 films;Physica B: Condensed Matter;2024-02
2. High-throughput predictions of two-dimensional dielectrics with first-principles calculations;Physical Review B;2023-12-07
3. Effect of annealing on the properties of pristine and Zn2+ and Sm3+ codoped HfO2 films;INTELLIGENT BIOTECHNOLOGIES OF NATURAL AND SYNTHETIC BIOLOGICALLY ACTIVE SUBSTANCES: XIV Narochanskie Readings;2023
4. Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning;Nanomaterials;2022-07-07
5. Burnable absorbers in nuclear reactors – A review;Nuclear Engineering and Design;2022-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3