Multiphysics simulation and analysis of MEMS-based chevron shaped electro-thermal actuator for quad-way switching application
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference5 articles.
1. M.J. Sinclair, A high force low area MEMS thermal actuator, THERM 2000. The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069), 2000, pp. 127–132, https://doi.org/10.1109/ITHERM.2000.866818.
2. A review on actuation and sensing techniques for MEMS-based microgrippers;Yang;J. Micro-Bio Robot.,2017
3. A comprehensive survey on microgrippers design: Operational strategy;Dochshanov;J. Mech. Des.,2017
4. Review of electrothermal actuators and applications;Potekhina;Actuators.,2019
5. Ziko, Mehadi & Koel, Ants, Theoretical and Numerical Investigations on a Silicon-based MEMS Chevron type thermal actuator. (2018) 1–5. https://doi.org/10.1109/NANO.2018.8626366.
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1. MEMS Switch Realities: Addressing Challenges and Pioneering Solutions;Micromachines;2024-04-23
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