Author:
Cheulkar Laukik N.,Sawant Vishram B.,Mohite Suhas S.
Reference23 articles.
1. RF-MEMS: Theory design and technology;Rebeiz,2003
2. Metal Based Thin Films for Electronics;Wetzig,2006
3. Manufacturing Techniques for Microfabrication and Nanotechnology;Madou,2009
4. Realization of low-stress Au cantilever beams;Stanec;J. Micromech. Microeng.,2007
5. Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures;Baek;Sens. Actuat. A Phys.,2005
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献