Analysis of the effect of sputter power on the morphological and mechanical characteristics of titanium thin films deposited on high-speed steel (HSS)
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference11 articles.
1. Development of graded Cr–Ti–N coatings
2. The effect of bias power on some properties of titanium and titanium oxide films prepared by r.f. magnetron sputtering
3. Thickness effect on properties of titanium film deposited by d.c. magnetron sputtering and electron beam evaporation techniques
4. Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition
5. Atmospheric pressure chemical vapour deposition of titanium dioxide coatings on glass
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