Electromechanical characterization of Nitinol based RF MEMS switch-Reference-Cited by-同舟云学术

Electromechanical characterization of Nitinol based RF MEMS switch

Published:2020 Issue: Volume:27 Page:443-445
ISSN:2214-7853
Container-title:Materials Today: Proceedings
language:en
Short-container-title:Materials Today: Proceedings

Author:

Bale Ajay Sudhir,Reddy Suhaas V.,Huddar Shivashankar A.

Publisher

Elsevier BV

Subject

General Medicine

Reference15 articles.

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4. M-test: a test chip for MEMS mechanical property measurement using electrostatically actuated test structures;Osterberg;J. Micromech. Syst.,1997

5. Surface micromachined polysilicon accelerometer;Ristic,1992

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