Author:
Äyräs P,Rantala J.T,Honkanen S,Mendes S.B,Peyghambarian N
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. J.T. Rantala, R.S. Penner, S. Honkanen, J. Vähäkangas, M. Fallahi, N. Peyghambarian, Negative tone hybrid sol–gel material for electron-beam lithography, Thin Solid Films, in press.
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