Scanning probe oxidation of Si3N4 masks for nanoscale lithography, micromachining, and selective epitaxial growth on silicon
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference90 articles.
1. Noncontact nanolithography using the atomic force microscope;Wilder;Appl. Phys. Lett.,1998
2. Electron beam and scanning probe lithography: a comparison;Wilder;J. Vac. Sci. Technol. B,1998
3. Nanoscale patterning and oxidation of H-passivated Si(100)-2×1 surfaces with an ultrahigh vacuum scanning tunneling microscope;Lyding;Appl. Phys. Lett.,1994
4. Atomic-scale desorption through electronic and vibrational excitation mechanisms;Shen;Science,1995
5. Modification of hydrogen-terminated silicon by a scanning tunneling microscope operating in air;Dagata;Appl. Phys. Lett.,1990
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography;Applied Surface Science;2021-02
2. Nanolithography by Scanning Probes for Biorecognition;Emerging Micro - and Nanotechnologies;2020-05-06
3. Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices;Electrical Atomic Force Microscopy for Nanoelectronics;2019
4. Nonuniform functional group distribution of carbon nanotubes studied by energy dispersive X-ray spectrometry imaging in SEM;Nanoscale;2019
5. Fabrication of High Aspect Ratio Silicon Nanochannel Arrays;ECS Solid State Letters;2012-08-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3