Inverse profiling by ellipsometry: a Newton-Kantorovitch algorithm-Reference-Cited by-同舟云学术

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Inverse profiling by ellipsometry: a Newton-Kantorovitch algorithm

Published:1994-01 Issue:1-2 Volume:105 Page:104-112
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Tonova Diana A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Inverse scattering problems in optics,1980

2. Special issue on inverse scattering method in electromagnetics,1981

3. Special issue on inverse problems in propagation and scattering,1985

4. Electromagnetic inverse profiling: theory and numerical implementation;Tijhus,1987

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2. Interfaces in ALD very thin Al₂O₃/HfO₂ stacks studied by ellipsometry;Journal of Physics: Conference Series;2023-01-01

3. Influence of Hf doping on interfacial layers of Ta2O5 stacks studied by ellipsometry;Applied Surface Science;2013-04

4. Numerical methods for the design of gradient-index optical coatings;Applied Optics;2012-11-30

5. Spectroscopic ellipsometry of very thin tantalum pentoxide on Si;Applied Surface Science;2009-08

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