A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing
Author:
Funder
National Research Foundation of South Africa
Publisher
Elsevier BV
Subject
Applied Mathematics,Mechanical Engineering,Mechanics of Materials
Reference12 articles.
1. K.E. Beschorner, C.F. Higgs III, M.R. Lovell, Derivation of Reynolds equation in cylindrical coordinates applicable to pin-on-disk and CMP, in: Proceedings of the STLE/ASME International Joint Tribology Conference IJTC2007 October 20–22, 2008, Miami, Florida, USA, American Society of Mechanical Engineers, 2008.
2. Solution of Reynolds equation in polar coordinates applicable to nonsymmetric entrainment velocities;Beschorner;J. Tribology,2009
3. Investigation of the effect of the Coriolis force on a thin fluid film on a rotating disk;Momoniat;Int. J. Nonlinear Mech.,1998
4. The effect of the Coriolis force on axisymmetric rotating thin film flows;Myers;Int. J. Non-Linear Mech.,2001
5. The importance of the Coriolis force on axisymmetric horizontal rotating thin film flows;Myers;Chem. Eng. Process.,2006
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Approximation of forces of fluid film bearing lubricating layer using machine learning methods;VESTNIK of Samara University. Aerospace and Mechanical Engineering;2023-11-03
2. Application of Machine Learning in Simulation Models and Optimal Controllers for Fluid Film Bearings;Proceedings of the 11th IFToMM International Conference on Rotordynamics;2023-08-27
3. Recent developments and applications of chemical mechanical polishing;The International Journal of Advanced Manufacturing Technology;2020-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3