Line resolution in the sub-ten-nanometer range in SAM
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
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5. The interpretation of the spatial resolution of the scanning Auger electron microscope
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1. Spatially resolved surface spectroscopy;Stress and Strain in Epitaxy;2001
2. Monte Carlo Simulations of Edge Artefacts in MULSAM Images;Modern Developments and Applications in Microbeam Analysis;1998
3. Auger electron microscopy: An overview;Czechoslovak Journal of Physics;1994-03
4. Nanometer-resolution surface analysis with Auger electrons;Ultramicroscopy;1993-12
5. Nanometer resolution analysis of surfaces;Surface Science;1993-05
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