High brightness sources for electron and ion beam microscopy and micro-lithography

Author:

Mair G.L.R.,Mulvey T.

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. Electron Gun Using a Field Emission Source

2. Field emission, developments and possibilities

3. Proc. 4th European Regional Conf. on Electron Microscopy;Plomp,1968

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. The Scanning Electron Microscope;Handbook of Charged Particle Optics, Second Edition;2008-10-24

2. Isotopic anomaly in dimer emission from alloy liquid-metal-ion-source mass spectroscopy;Physical Review B;1996-07-01

3. A lifetime in electron optics: a biographical sketch of Tom Mulvey with a bibliography;Journal of Microscopy;1995-08

4. Critical issues in scanning electron microscope metrology;Journal of Research of the National Institute of Standards and Technology;1994-09

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