Low-energy ion optical system with a liquid-metal ion source for imaging and processing solid structures
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. High resolution scanning ion probes: Applications to physics and biology
2. Focused ion beam processing
3. Fabrication of one-dimensional GaAs wires by focused ion beam implantation
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3. Effect of tip curvature on ionic emissions from Taylor cones of ionic liquids from externally wetted tungsten tips;Journal of Applied Physics;2009-02
4. Low energy focused ion beam system design;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-07
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