Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation

Author:

Ding Yangyao,Zhang Yichi,Ren Yi Ming,Orkoulas Gerassimos,Christofides Panagiotis D.

Funder

University of California, Los Angeles

Publisher

Elsevier BV

Subject

General Chemical Engineering,General Chemistry

Reference51 articles.

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