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Arc Vapor Deposition

Published:1998 Issue: Volume: Page:406-425
ISSN:
Container-title:Handbook of Physical Vapor Deposition (PVD) Processing
language:
Short-container-title:

Author:

Mattox Donald M.

Publisher

Elsevier

Reference72 articles.

1. Handbook of Vacuum Arc Science and Technology,1996

2. Handbook of Plasma Processing Technology;Sanders,1990

3. Handbook of Thin Film Process Technology;Martin,1995

4. Arc Plasma Technology in Material Science;Gerdeman,1972

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