Aqueous Cleaning and Surface Conditioning Processes-Reference-Cited by-同舟云学术

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Aqueous Cleaning and Surface Conditioning Processes

Published:2008 Issue: Volume: Page:201-265
ISSN:
Container-title:Handbook of Silicon Wafer Cleaning Technology
language:
Short-container-title:

Author:

Gale Glenn W.,Small Robert J.,Reinhardt Karen A.

Publisher

Elsevier

Reference124 articles.

1. Carbonized layer formation in ion implanted photoresist masks

2. Handbook of Semiconductor Manufacturing Technology;Kern,2000

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