Electrical and structural properties of NiCr thin film resistors reactively sputtered in O2
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Trans. 8th Natl. Vac. Symp.;Lakshmanan,1961
2. Some characteristic properties of NiCr thin films
3. The effect of composition on the temperature coefficient of resistance of NiCr films
4. The Sputtering of Nickel–Chromium Alloys
5. Reactivity sputtered tantalum thin film resistors Part 1. Physical and electrical properties
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