Author:
Blom F.R.,van de Pol F.C.M.,Bauhuis G.,Popma Th.J.A.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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1. Resonant diaphragm pressure measurement system with ZnO on Si excitation
2. S. Bouwstra, University of Twenet, personal communication (1986).
3. Resonant silicon beam force sensor;Blom,1989
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