An aluminum oxynitride film
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Al2O3 films for integrated optics
2. A comparative study of evaporated Al2O3, SiO2 and SiO2·Al2O3 thin films
3. Optical properties of sputtered AIN films and coated GaAs
4. Synthesis and properties of ultrafine AlN powder by rf plasma
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