Author:
Norström H.,Maex K.,Vandenabeele P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
17 articles.
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1. Back-End (Interconnect) Processing Technologies;Integrated Circuit Fabrication;2023-11-16
2. Metal Silicides in CMOS Technology: Past, Present, and Future Trends;Critical Reviews in Solid State and Materials Sciences;2003-11
3. Salicides;Encyclopedia of Materials: Science and Technology;2001
4. Metal Silicides: Active elements of ULSI contacts;Journal of Electronic Materials;1996-11
5. Formation and stability of silicides on polycrystalline silicon;Materials Science and Engineering: R: Reports;1996-02