Reactive deposition of In2O3 films on nucleated-crystallite substrates
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Electrical properties of undoped In2O3films prepared by reactive evaporation
2. Microstructure and Electro‐Optical Properties of Evaporated Indium‐Oxide Films
3. Some finite temperature aspects of the Anderson transition
4. Evaporated Sn‐doped In2O3films: Basic optical properties and applications to energy‐efficient windows
5. Influence of substrate temperature and film thickness on the structure of reactively evaporated In2O3 films
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1. XPS and AFM studies of surface chemistry and morphology of In2O3ultrathin films deposited by rheotaxial growth and vacuum oxidation after air exposure;Crystal Research and Technology;2015-09-16
2. The effect of Si substrate preparation on surface morphology and surface composition of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation;Applied Surface Science;2012-08
3. XPS and AFM studies of surface chemistry and morphology of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation;Thin Solid Films;2011-11
4. Study of ITO Thin Film Deposited by RF Magnetron Sputter at Low Temperature;Advanced Materials Research;2010-11
5. Effect of substrate temperature on structural and electrical properties of liquid-delivery metal organic chemical vapor deposited indium oxide thin films on silicon;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008
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