Reactive evaporation of thin titanium nitride films in ultrahigh vacuum and their friction and wear behavior as a function of contact stress
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. Summary Abstract: Properties of TiN thin films on several substrate plates with a high current ion mixing machine
2. Processes of the activated reactive evaporation type and their tribological applications
3. Ion Plating and Implantation: Applications to Materials;Sartwell,1986
4. Ion beam modification of TiN films during vapor deposition
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