ZnO processing for integrated optic sensors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Low loss zinc oxide optical waveguides on amorphous substrates;Hickernell,1980
2. R.f.-sputtered epitaxial ZnO films on sapphire for integrated optics;Paradis;Thin Solid Films,1976
3. Characterization of ZnO piezoelectric films prepared by r.f. planar-magnetron sputtering;Yamamoto;J. Appl. Phys.,1980
4. Optical waveguide micro-displacement sensor;Izutsu;Electron. Lett.,1982
5. Integrated optical temperature sensor;Johnson;Appl. Phys. Lett.,1982
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