Grain growth of laser-recrystallized polycrystalline and amorphous silicon films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Polycrystalline Silicon for Integrated Circuit Application;Kamins,1988
2. High performance low-temperature poly-Si n-channel TFTs for LCD
3. A full-color LCD addressed by poly-Si TFTs fabricated below 450 degrees C
4. Beam-induced seeded lateral epitaxy with suppressed impurity diffusion for a three-dimensional DRAM cell fabrication
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1. Pulsed Laser Crystallization of Silicon Films Deposited by PECVD;Advanced Materials Research;2012-03
2. Passivation-Induced Subthreshold Kink Effect of Ultrathin-Oxide Low-Temperature Polycrystalline Silicon Thin Film Transistors;IEEE Electron Device Letters;2011-07
3. Fabrication of High Performance Low-Temperature Poly-Si Thin-Film Transistors Using a Modulated Process;Journal of The Electrochemical Society;2002
4. Characterization of pulsed laser crystallization of silicon thin film;Solar Energy Materials and Solar Cells;2001-02
5. Ellipsometric study of thermal and laser annealed amorphous and microcrystalline silicon films;Applied Surface Science;1996-02
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