Realization of porous silicon membranes for gas sensor applications-Reference-Cited by-同舟云学术

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Realization of porous silicon membranes for gas sensor applications

Published:1995-01 Issue:1-2 Volume:255 Page:310-312
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Taliercio T.,Dilhan M.,Massone E.,Gué A.M.,Fraisse B.,Foucaran A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Electropolishing Silicon in Hydrofluoric Acid Solutions

2. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

3. A new dielectric isolation method using porous silicon

4. Proc. 20th Eur. Solid State Device Research Conf.;Keen,1990

5. Porosity and Pore Size Distributions of Porous Silicon Layers

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1. Electro-Thermal-Mechanical Modeling of Gas Sensor Hotplates;Sensor Systems Simulations;2019-06-19

2. Porous Silicon Gas Sensing;Handbook of Porous Silicon;2018

3. Porous Silicon Membranes;Handbook of Porous Silicon;2018

4. Porous Silicon Gas Sensing;Handbook of Porous Silicon;2014

5. Porous Silicon Membranes;Handbook of Porous Silicon;2014

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