Author:
Illmann U.,Ebert R.,Reisse G.,Freller H.,Lorenz P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. CO2 laser induced CVD of TiN;Conde;Appl. Surf. Sci.,1992
2. Laser chemical vapor deposition of TiN films;Chen,1990
3. Laser induced chemical vapour depostion of conductive and insulating thin films;Ebert,1992
4. Chemical vapor deposition of titanium nitride at low temperatures;Kurtz;Thin Solid Films,1986
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