Investigation of thin-film transistors using a combination of focused ion beam etching and cross-sectional transmission electron microscopy observation-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Investigation of thin-film transistors using a combination of focused ion beam etching and cross-sectional transmission electron microscopy observation

Published:1996-08 Issue: Volume:281-282 Page:562-567
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tsuji S.,Tsujimoto K.,Tsutsui N.,Miura N.,Kuroda K.,Saka H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Microclectronic Materials;Grovenor,1992

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The impact of focused ion beam induced damage on scanning spreading resistance microscopy measurements;Scientific Reports;2020-09-10

2. Combining FIB milling and conventional Argon ion milling techniques to prepare high-quality site-specific TEM samples for quantitative EELS analysis of oxygen in molten iron;Journal of Microscopy;2009-10-23

3. Investigation of multilayered aluminium-coated polymer laminates by focused ion beam (FIB) etching;Surface and Coatings Technology;2006-05

4. Application of focused ion beam techniques and transmission electron microscopy to thin-film transistor failure analysis;Journal of Electron Microscopy;2004-10-01

5. Application of FIB/TEM to Failure Analysis of Liquid Crystal Displays;Journal of the Japan Institute of Metals;2004

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP