Author:
Pimentel F.,Zalar A.,Hofmann S.,Kohl D.,Panjan P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. VLSI Technology;Sze,1988
2. Silicides for VLSI Applications;Murarka,1983
Cited by
9 articles.
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