Author:
Hattori Shuzo,Tamano Junji,Yamada Masao,Ieda Masayuki,Morita Shinzo,Yoneda Katsumi,Ishibashi Shintaro
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Thin Film Processes,1978
2. Handotai Plasma-process Gijutsu,1980
3. Proc. 8th Technical Conf. on Photopolymer Principles, Processes and Materials;Hughes,1979
4. Plasma polymerized methyl‐methacrylate as an electron‐beam resist
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