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Preparation of ZnO thin films by plasma-enhanced organometallic chemical vapour deposition

  • Published:1982-10 Issue:2 Volume:96 Page:149-154
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Shimizu Masaru,Horii Tadashi,Shiosaki Tadashi,Kawabata Akira

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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2. ZnO and Related Materials;Metalorganic Vapor Phase Epitaxy (MOVPE);2019-08-30

3. Boron-Doped Plasma Enhanced Chemical Vapor Deposition of ZnO Thin Films;Electrochemical and Solid-State Letters;2008

4. ZnO Thin Film, Device, and Circuit Fabrication using Low-Temperature PECVD Processes;Journal of Electronic Materials;2007-12-21

5. Preparation of ZrO2 , Zno, and Zns Thin Films;Inorganic Syntheses;2007-01-05
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